ㆍOptical resolution: 4,800dpi×9,600dpi (with Micro Step)
ㆍOutput resolution : 50dpi~6400dpi(Increase/decrease by 1dpi), 9600,12800dpi
ㆍScanning speed : Black and white A4 300dpi -> 12 seconds, color A4 300dpi -> 14 seconds
ㆍDimension: 500mm(W) x 340mm(D) x 90mm(H)
ㆍVideo processing speed : 10 sec/ 2 inch wafer
ㆍInput model name, serial number, and operator name
ㆍSet up, save, open and modify condition for various chips
ㆍSave measurement data in DB via Ethernet